论文信息 - Plasma-chemical treatment effect observed during the fabrication of AlGaN/GaN devices - 字舞流文

Plasma-chemical treatment effect observed during the fabrication of AlGaN/GaN devices

V. I. Korneev | K. Enisherlova | V. Kulikauskas | L. Seidman | V. V. Pishchagin | A. Konovalov