Active Disturbance Rejection Control for Discrete Systems

A form of active disturbance rejection control (ADRC) is proposed for a kind of discrete systems in this paper. The state space form of the system is firstly formulated. Then the extended state observers (ESO) with and without model information are presented to estimate states and total disturbance. The control law is formulated to reject disturbance and to track a given trajectory. As a case study, the semiconductor manufacturing process is used to validate the proposed solution. Comparing with the exponentially weighted moving average controller, simulations indicate that the proposed discrete ADRC is effective in cancelling disturbance and in tracking the desired target.

[1]  Dawei Shi,et al.  On convergence of extended state observers for discrete-time nonlinear systems , 2015, 2015 34th Chinese Control Conference (CCC).

[2]  R. Vaccaro Digital control : a state-space approach , 1995 .

[3]  Qing Zheng,et al.  On Active Disturbance Rejection Control;Stability Analysis and Applications in Disturbance Decoupling Control , 2009 .

[4]  Han Jing-qing Stability Analysis and Synthesis of Third Order Discrete Extended State Observer , 2008 .

[5]  An-Chen Lee,et al.  Assessing Measurement Noise Effect in Run-to-Run Process Control: Extends EWMA Controller by Kalman Filter , 2011 .

[6]  David Shan-Hill Wong,et al.  An Extended State Observer-Based Run to Run Control for Semiconductor Manufacturing Processes , 2019, IEEE Transactions on Semiconductor Manufacturing.

[7]  Weiyao Lan,et al.  Replacing PI Control With First-Order Linear ADRC , 2019, 2019 IEEE 8th Data Driven Control and Learning Systems Conference (DDCLS).

[8]  Denis Royston Towill,et al.  A discrete transfer function model to determine the dynamic stability of a vendor managed inventory supply chain , 2002 .

[9]  Zhiqiang Gao,et al.  Discrete implementation and generalization of the extended state observer , 2006, 2006 American Control Conference.

[10]  Congzhi Huang,et al.  Equivalence Among Flat Filters, Dirty Derivative-Based PID Controllers, ADRC, and Integral Reconstructor-Based Sliding Mode Control , 2020, IEEE Transactions on Control Systems Technology.

[11]  Zhiqiang Gao,et al.  Scaling and bandwidth-parameterization based controller tuning , 2003, Proceedings of the 2003 American Control Conference, 2003..

[12]  S. Joe Qin,et al.  Semiconductor manufacturing process control and monitoring: A fab-wide framework , 2006 .

[13]  Wen Tan,et al.  Tuning of linear ADRC with known plant information. , 2016, ISA transactions.

[14]  Tianhong Pan,et al.  Survey on Run-to-Run Control Algorithms in High-Mix Semiconductor Manufacturing Processes , 2015, IEEE Transactions on Industrial Informatics.

[15]  Wan Kyun Chung,et al.  A discrete-time design and analysis of perturbation observer for motion control applications , 2003, IEEE Trans. Control. Syst. Technol..

[16]  Baoqun Yin,et al.  Sampled-data feedback control of Han canonical form , 2016, 2016 12th IEEE International Conference on Control and Automation (ICCA).

[17]  Huijun Gao,et al.  Data-Driven Control and Learning Systems , 2017, IEEE Trans. Ind. Electron..

[18]  Han Zhang,et al.  An active disturbance rejection control solution for the two-mass-spring benchmark problem , 2016, 2016 American Control Conference (ACC).

[19]  Arnon M. Hurwitz,et al.  Run-to-Run Process Control: Literature Review and Extensions , 1997 .

[20]  Ling Shi,et al.  Performance Assessment of Discrete-Time Extended State Observers: Theoretical and Experimental Results , 2018, IEEE Transactions on Circuits and Systems I: Regular Papers.