Measurement of quantum efficiency of a charge coupled device

We report a measurement of the quantum efficiency of a charge coupled device (CCD) with a simple method and report a resultant quantum efficiency in the energy range from 0.47 to 9 keV. The CCD is a front side illuminated device and is fabricated by Hamamatsu Photonics K.K. The quantum efficiency for 4.5 keV x rays is 11% for the single pixel events, 33% for the spectroscopic events, and 60% for flux mode operation. We present the quantum efficiency as a function of the energy.

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