Study and design of micro-focusing mechanism for an acoustic microscope

This paper deals with the design of a micro- focussing mechanism for the acoustic microscope through the theory of flexure hinge. The paper gives the calculating way and formulas for design of flexure hinge. The flexure hinge mechanism amplified by two step levers and corresponding controller is implemented. It is shown by experi-mental results that the resolution of the micro- focussing system is higher than 0.001mm and an adjusting range of 16Oim is achieved. In addition, the paper also discusses the driving property of a piezoelectric actuator used in flexure hinge mechanism.