论文信息 - Ion beam suppression of hillock growth in aluminium thin films - 字舞流文

Ion beam suppression of hillock growth in aluminium thin films

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[2] Bernard Smith,et al. Ion implantation range data for silicon and germanium device technologies , 1977 .

[3] G. L. Schnable,et al. Processes for multilevel metallization , 1974 .

[4] M. A. Schuster,et al. Hillock Growth on Vacuum Deposited Aluminum Films , 1972 .