Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition
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E. Rosseel | H. Bender | D. Wouters | J. Kittl | C. Adelmann | J. Swerts | B. Kaczer | W. Vandervorst | P. Favia | G. Schoofs | C. Vrancken | H. Tielens | M. Popovici | A. Moussa | S. Elshocht | N. Menou | K. Tomida | M. Pawlak