A stochastic model for electrodeposition process with applications in filtering and boundary control

Electrodeposition is a complex partially observed mass-transfer process driven by several surface reactions without exact model. In this article, the process uncertainties are described by a finite number of Wiener processes in a stochastic model applied in the filtering and control problems. These problems are solved as a boundary observation-control problem based on a finite diffusion model with uncertainties in the domain interior and on the boundaries. A mixed boundary problem is considered on an interval with the Dirichlet data on one end (bulk solution) and Neumann data on the other end (cathode surface). The concentration of oxidising species in the domain interior is unattainable for observations but the flux on the boundary (electric current) can be measured with a limited accuracy (sensor error). The total flux for the main and side reactions is controlled by the current density on the cathode surface. The disturbing effect of the side reactions is modelled as a noise. The concentration of species is stabilised at the desired level near to the cathode surface with a relatively simple feedback control. The concentration on the boundary and in the domain is estimated as a conditionally Gaussian process in the course of filtering. The estimated conditional mean of concentration is solved from a stochastic partial differential equation in dependence on the covariance kernel. A relatively good quality of estimation and control is demonstrated in the process of simulation in the realistic conditions for a copper deposition process.

[1]  N. Ahmed Optimal Relaxed Controls for Infinite-Dimensional Stochastic Systems of Zakai Type , 1996 .

[2]  Bin Liu,et al.  Optimal control problem for stochastic evolution equations in Hilbert spaces , 2010, Int. J. Control.

[3]  T. Kurtz,et al.  Stochastic equations in infinite dimensions , 2006 .

[4]  M. Veraar,et al.  Stochastic Equations with Boundary Noise , 2010, 1001.2137.

[5]  K. Kadlec,et al.  Stochastic Evolution Equations , 2013 .

[6]  M. Aschwanden Statistics of Random Processes , 2021, Biomedical Measurement Systems and Data Science.

[7]  R. Sowers Multidimensional Reaction-Diffusion Equations with White Noise Boundary Perturbations , 1994 .

[8]  Robert Tenno,et al.  Implementing surfactant mass balance in 2D FEM–ALE models , 2011, Engineering with Computers.

[9]  M. D. Rooij,et al.  Electrochemical Methods: Fundamentals and Applications , 2003 .

[10]  Marco Fuhrman,et al.  Optimal control of a stochastic heat equation with boundary-noise and boundary-control , 2007 .

[11]  P. Christofides,et al.  Multivariable predictive control of thin film deposition using a stochastic PDE model , 2005, Proceedings of the 2005, American Control Conference, 2005..

[12]  Alain Bensoussan,et al.  Representation and Control of Infinite Dimensional Systems, 2nd Edition , 2007, Systems and control.

[13]  P. Christofides,et al.  Dynamic output feedback covariance control of stochastic dissipative partial differential equations , 2008 .

[14]  A. Pohjoranta,et al.  Microvia fill process control , 2009, Int. J. Control.

[15]  Alʹbert Nikolaevich Shiri︠a︡ev,et al.  Statistics of random processes , 1977 .

[16]  M. Ferrante,et al.  SPDEs with coloured noise : analytic and stochastic approaches , 2004, math/0408140.

[17]  M. Sanz-Solé,et al.  Equivalence and Hölder-Sobolev regularity of solutions for a class of non-autonomous stochastic partial differential equations , 2003 .

[18]  Robert Tenno,et al.  Electrode kinetics parameters estimation using Zakai equation , 2009 .

[19]  N. U. Ahmed,et al.  On Filtering Equations in Infinite Dimensions , 1997 .

[20]  B. Rozovskii Stochastic Evolution Systems , 1990 .

[21]  M. Freidlin Random perturbations of reaction-difiusion equations: the quasi de-terministic approximation , 1988 .

[22]  R. Curtain A Survey of Infinite-Dimensional Filtering , 1975 .

[23]  J. Lions Optimal Control of Systems Governed by Partial Differential Equations , 1971 .

[24]  Viorica Mariela Ungureanu Optimal control of linear stochastic evolution equations in Hilbert spaces and uniform observability , 2009 .

[25]  A. Bensoussan Stochastic Control of Partially Observable Systems , 1992 .

[26]  M. Krstić,et al.  Boundary Control of PDEs , 2008 .

[27]  D. Ni,et al.  Construction of stochastic PDEs for feedback control of surface roughness in thin film deposition , 2005, Proceedings of the 2005, American Control Conference, 2005..

[28]  A. Al-Hussein Necessary Conditions for Optimal Control of Stochastic Evolution Equations in Hilbert Spaces , 2011 .

[29]  Robert Tenno,et al.  Adaptive boundary concentration control using Zakai equation , 2010, Int. J. Control.

[30]  Martin Hairer,et al.  An Introduction to Stochastic PDEs , 2009, 0907.4178.

[31]  M. Freidlin,et al.  Reaction-Diffusion Equations with Randomly Perturbed Boundary Conditions , 1992 .

[32]  Robert Tenno,et al.  A Method for Microvia-Fill Process Modeling in a Cu Plating System with Additives , 2007 .

[33]  Robert Tenno,et al.  Electrodeposition process boundary concentration control based on motion planning and Zakai filtering: control simulation for unstirred/stirred electrolytes , 2011, Int. J. Control.

[34]  Control of diffusion limited electrochemical redox processes: Simulation study , 2012 .