Low-noise single Photon Avalanche Diodes in 0.15 μm CMOS technology

Two different Single-Photon Avalanche Diode (SPAD) structures in a standard 0.15-nm CMOS technology are presented. A characterization of the two detectors, having a 10-μm active-area diameter, and monolithically integrated with a passive quenching circuit and a fast comparator is presented. The two devices exhibit respectively a typical dark count rate of 230cps and 160cps, an afterpulsing probability of 2.1% and 1.3% at 30ns dead time, a Photon Detection Probability of 31% and 26 % at λ=470nm and a timing resolution of 170ps and 60ps. The adopted technology is therefore promising for the realization of SPAD-based image sensors with good overall performance.

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