论文信息 - IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing - 字舞流文

IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

P. Sarro | G. Pandraud | H. Tong | C. V. van Rijn | L. D. de Smet | T. Moh | Y. Maruyama | C. Shen | E. Sudholter