Outgassing behavior of A6063‐EX aluminum alloy and SUS 304 stainless steel

The outgassing behavior of A6063‐EX aluminum alloy and SUS 304 stainless steel has been studied by means of analyzing the outgassing rate curves and the residual gases in the vacuum system. The results indicate, when the chamber has been filled with moist gas, the major outgassing process is diffusion for the aluminum alloy, but is desorption for the stainless steel. When the filling gas is extremely dry, the outgassing stimulated by the filament of the ionization gauge may become dominant for both the aluminum alloy and the stainless‐steel vacuum chambers.