At-wavelength metrology using the moiré fringe analysis method based on a two dimensional grating interferometer

Abstract A two-dimensional (2D) grating interferometer was used to perform at-wavelength metrology. A Fast Fourier Transform (FFT) of the interferograms recovers the differential X-ray beam phase in two orthogonal directions simultaneously. As an example, the X-ray wavefronts downstream from a Fresnel Zone plate were measured using the moire fringe analysis method, which requires only a single image. The rotating shearing interferometer technique for moire fringe analysis was extended from one dimension to two dimensions to carry out absolute wavefront metrology. In addition, the 2D moire fringes were extrapolated using Gerchberg's method to reduce the boundary artifacts. The advantages and limitations of the phase-stepping method and the moire fringe analysis method are also discussed.

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