Achievement of an important milestone to realize the EUV-FEL high power light source for future lithograph

An EUV-FEL is one of the promising candidates for the future high power EUV light source of more than 1 kW. While the design study on the FEL light source has been progressed, a most important milestone should be a real demonstration of the high repetition rate ERL-based FEL light production. In FY2019, a real Mid-Infrared FEL (MIR-FEL) project based on the compact ERL in KEK started and the beam commissioning was started from the beginning of March 2020. At the conference, the present results obtained from the MIR-FEL and the expected remained-study-works on future EUV-FEL will be presented.