Insect-sized Holonomic Robots for Precise, Omnidirectional, and Flexible Microscopic Processing: Identification, Design, Development, and Basic Experiments

Abstract In this paper, we describe the design and development of an insect-sized holonomic robot with nanometer resolution. To provide flexible and compact-sized microscopic operations, a unique locomotion mechanism composed of four piezoelectric actuators and two U-shaped electromagnetic legs is proposed. Here, two legs are arranged across from each other and are connected by four piezoelectric actuators so that the mechanism can move in any direction, i.e. in the X- and Y-directions as well as rotation, at a specified point in the manner of an inchworm. In the primary experiments, several performances such as positioning repeatability, resolution, and precise dexterity are checked using a CCD camera-based microscopic image tracker and a capacitive distance sensor. The identification, characteristics, design procedures, and basic performance are addressed and the biomedical, nanoscience, and chip mounting applications of this tiny holonomic robot are discussed to open up a new field of microrobotics for use in precise regions.

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