Performance characterization of microtomography with complementary metal-oxide-semiconductor detectors for computer-aided defect inspection

We developed a computer-aided defect inspection system based on computed tomography (CT). The system consists of a homemade small cone-beam CT (CBCT) system and a graphical toolbox, which is used to extract a computer-aided design (CAD) model from the CT data. In the small CBCT system, the x-ray imaging detector is based on a complementary metal-oxide-semiconductor photodiode array in conjunction with a scintillator. Imaging performance of the detector was evaluated in terms of modulation-transfer function, noise-power spectrum, and detective quantum efficiency. The tomographic imaging performance of the small CBCT system was evaluated in terms of signal-to-noise ratio and contrast-to-noise ratio. The graphical toolbox to support defect inspection incorporates various functional tools such as volume rendering, segmentation, triangular-mesh data generation, and data reduction. All the tools have been integrated in a graphical-user interface form. The developed system can provide rapid visual inspection as ...

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