CVD-Enabled Graphene Manufacture and Technology

Integrated manufacturing is arguably the most challenging task in the development of technology based on graphene and other 2D materials, particularly with regard to the industrial demand for “electronic-grade” large-area films. In order to control the structure and properties of these materials at the monolayer level, their nucleation, growth and interfacing needs to be understood to a level of unprecedented detail compared to existing thin film or bulk materials. Chemical vapor deposition (CVD) has emerged as the most versatile and promising technique to develop graphene and 2D material films into industrial device materials and this Perspective outlines recent progress, trends, and emerging CVD processing pathways. A key focus is the emerging understanding of the underlying growth mechanisms, in particular on the role of the required catalytic growth substrate, which brings together the latest progress in the fields of heterogeneous catalysis and classic crystal/thin-film growth.

[1]  A. Locatelli,et al.  Bottom-up approach for the low-cost synthesis of graphene-alumina nanosheet interfaces using bimetallic alloys , 2014, Nature Communications.

[2]  S. Banerjee,et al.  Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils , 2009, Science.

[3]  F. Ducastelle,et al.  Importance of carbon solubility and wetting properties of nickel nanoparticles for single wall nanotube growth. , 2012, Physical review letters.

[4]  Byung-Sung Kim,et al.  Wafer-Scale Growth of Single-Crystal Monolayer Graphene on Reusable Hydrogen-Terminated Germanium , 2014, Science.

[5]  R. Schlögl,et al.  On the mechanisms of Ni-catalysed graphene chemical vapour deposition. , 2012, Chemphyschem : a European journal of chemical physics and physical chemistry.

[6]  G. Somorjai,et al.  Low energy electron diffraction studies of gas adsorption on the platinum (100) single crystal surface , 1968 .

[7]  M. Batzill,et al.  Monolayer graphene growth on Ni(111) by low temperature chemical vapor deposition , 2012 .

[8]  R. Baughman,et al.  Carbon Nanotubes: Present and Future Commercial Applications , 2013, Science.

[9]  A. Stierle,et al.  Novel In Situ Probes for Nanocatalysis , 2007 .

[10]  M. Batzill.  The surface science of graphene: Metal interfaces, CVD synthesis, nanoribbons, chemical modifications, and defects , 2012 .

[11]  A. M. van der Zande,et al.  Chemical vapor deposition-derived graphene with electrical performance of exfoliated graphene. , 2012, Nano letters.

[12]  W. Auwärter,et al.  Boron Nitride Nanomesh , 2004, Science.

[13]  Seok-Hee Lee,et al.  High-angle tilt boundary graphene domain recrystallized from mobile hot-wire-assisted chemical vapor deposition system. , 2014, Nano letters.

[14]  Y. Dedkov,et al.  General approach to understanding the electronic structure of graphene on metals , 2014, 1405.2556.

[15]  M. Willinger,et al.  Observing Graphene Grow: Catalyst–Graphene Interactions during Scalable Graphene Growth on Polycrystalline Copper , 2013, Nano letters.

[16]  Robert S. Weatherup,et al.  Nucleation Control for Large, Single Crystalline Domains of Monolayer Hexagonal Boron Nitride via Si-Doped Fe Catalysts , 2015, Nano letters.

[17]  B. Hong,et al.  Graphene transfer: key for applications. , 2012, Nanoscale.

[18]  Cyrile Deranlot,et al.  Interdependency of Subsurface Carbon Distribution and Graphene–Catalyst Interaction , 2014, Journal of the American Chemical Society.

[19]  K. Shepard,et al.  Boron nitride substrates for high-quality graphene electronics. , 2010, Nature nanotechnology.

[20]  Matthew T. Cole,et al.  Flexible Electronics: The Next Ubiquitous Platform , 2012, Proceedings of the IEEE.

[21]  James J. Mudd,et al.  Weak mismatch epitaxy and structural Feedback in graphene growth on copper foil , 2013, Nano Research.

[22]  D. A. Brownson,et al.  Graphene electrochemistry: fundamental concepts through to prominent applications. , 2012, Chemical Society reviews.

[23]  Eun Sung Kim,et al.  Transfer‐Free Growth of Few‐Layer Graphene by Self‐Assembled Monolayers , 2011, Advanced materials.

[24]  R. J. Waite,et al.  Nucleation and growth of carbon deposits from the nickel catalyzed decomposition of acetylene , 1972 .

[25]  R. Franklin.  Crystallite growth in graphitizing and non-graphitizing carbons , 1951, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[26]  O. Yazyev,et al.  Polycrystalline graphene and other two-dimensional materials. , 2014, Nature nanotechnology.

[27]  C. Oshima,et al.  REVIEW ARTICLE: Ultra-thin epitaxial films of graphite and hexagonal boron nitride on solid surfaces , 1997 .

[28]  He Tian,et al.  Growth and Raman spectra of single-crystal trilayer graphene with different stacking orientations. , 2014, ACS nano.

[29]  S. Pei,et al.  Control and characterization of individual grains and grain boundaries in graphene grown by chemical vapour deposition. , 2010, Nature materials.

[30]  Toshiyuki Kobayashi,et al.  Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process , 2013 .

[31]  J. Robertson,et al.  Substrate-assisted nucleation of ultra-thin dielectric layers on graphene by atomic layer deposition , 2012, 1411.3484.

[32]  Carl W. Magnuson,et al.  The Role of Surface Oxygen in the Growth of Large Single-Crystal Graphene on Copper , 2013, Science.

[33]  E. J. Freise,et al.  Structure of Graphite , 1962, Nature.

[34]  B. T. Kelly,et al.  Physics of Graphite , 1981 .

[35]  J. Robertson,et al.  In situ observations of catalyst dynamics during surface-bound carbon nanotube nucleation. , 2007, Nano letters.

[36]  E. Sutter,et al.  Chemistry under cover: tuning metal-graphene interaction by reactive intercalation. , 2010, Journal of the American Chemical Society.

[37]  P. Wallace.  The Band Theory of Graphite , 1947 .

[38]  C. R. Loper,et al.  The formation of kish graphite , 1991 .

[39]  Alessandro Vespignani,et al.  Random walks and search in time-varying networks. , 2012, Physical review letters.

[40]  Lars Samuelson,et al.  One-dimensional heterostructures in semiconductor nanowhiskers , 2002 .

[41]  A. Reina,et al.  Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. , 2009, Nano letters.

[42]  M. Chhowalla,et al.  A review of chemical vapour deposition of graphene on copper , 2011 .

[43]  Denis V. Vyalikh,et al.  Dynamics of graphene growth on a metal surface: a time-dependent photoemission study , 2009, 0904.3220.

[44]  S. Noda,et al.  Direct synthesis of few- and multi-layer graphene films on dielectric substrates by "etching-precipitation" method , 2015 .

[45]  T. Tanaka,et al.  A hetero-epitaxial-double-atomic-layer system of monolayer graphene/monolayer h-BN on Ni(111) , 2000 .

[46]  George C. Schatz,et al.  The journal of physical chemistry letters , 2009 .

[47]  R. Schloegl,et al.  In Situ Observations during Chemical Vapor Deposition of Hexagonal Boron Nitride on Polycrystalline Copper , 2014, Chemistry of materials : a publication of the American Chemical Society.

[48]  John Robertson,et al.  Sub-nanometer Atomic Layer Deposition for Spintronics in Magnetic Tunnel Junctions Based on Graphene Spin-Filtering Membranes , 2014, ACS nano.

[49]  Pinshane Y. Huang,et al.  Supplementary Materials for Tailoring Electrical Transport Across Grain Boundaries in Polycrystalline Graphene , 2012 .

[50]  A. Geim,et al.  Two-dimensional gas of massless Dirac fermions in graphene , 2005, Nature.

[51]  Gunuk Wang,et al.  Large hexagonal bi- and trilayer graphene single crystals with varied interlayer rotations. , 2014, Angewandte Chemie.

[52]  Graphene-passivated nickel as an oxidation-resistant electrode for spintronics. , 2014, ACS nano.

[53]  J. Nørskov,et al.  Towards the computational design of solid catalysts. , 2009, Nature chemistry.

[54]  Richard Van Noorden.  Chemistry: The trials of new carbon , 2011, Nature.

[55]  M. Batzill,et al.  Graphene monolayer rotation on Ni(111) facilitates bilayer graphene growth , 2012 .

[56]  J. Blakely,et al.  Carbon interaction with nickel surfaces: Monolayer formation and structural stability , 1979 .

[57]  R. Ruoff,et al.  Breaking of symmetry in graphene growth on metal substrates. , 2014, Physical review letters.

[58]  R. Schlögl,et al.  In situ characterization of alloy catalysts for low-temperature graphene growth. , 2011, Nano letters.

[59]  R. Schloegl,et al.  In situ observations of the atomistic mechanisms of Ni catalyzed low temperature graphene growth. , 2013, ACS nano.

[60]  R. Schloegl,et al.  Introducing Carbon Diffusion Barriers for Uniform, High-Quality Graphene Growth from Solid Sources , 2013, Nano letters.

[61]  Nicholas A. W. Bell,et al.  Free-standing graphene membranes on glass nanopores for ionic current measurements , 2015 .

[62]  B. Dlubak,et al.  Kinetic control of catalytic CVD for high-quality graphene at low temperatures. , 2012, ACS nano.

[63]  Young Hee Lee,et al.  Towards Wafer-Scale Monocrystalline Graphene Growth and Characterization. , 2015, Small.