A surface micromachined rotating micro-mirror normal to the substrate

An optical mirror for directing a laser parallel to the substrate surface has been designed and fabricated. The mirror consists of a 214 /spl mu/m/spl times/210 /spl mu/m, 3.5 /spl mu/m thick polysilicon plate, coated with a 0.5 /spl mu/m thick layer of gold. The mirror is connected to the substrate by 3 floating substrate hinges. Using microprobes, the mirror is lifted off of the substrate and up into a latch mechanism. The latch holds the mirror normal to the substrate. The floating substrate hinges are connected to a 200 /spl mu/m diameter circular 2.0 /spl mu/m thick polysilicon plate. This plate is mounted to the substrate via a rotating sliding anchor. The mirror is designed to be driven by an array of thermal actuators.