On the determination of representative stress-strain relation of metallic materials using instrumented indentation

Abstract In this study, attempts have been made to estimate the representative stress–strain relation of metallic materials from indentation tests using an iterative method. Finite element analysis was performed to validate the method. The results showed that representative stress–strain relations of metallic materials using the present method were in a good agreement with those from tensile tests. Further, this method was extended to predict representative stress–strain relation of ultra-thin molybdenum films with a thickness of 485 nm using nanoindentation. Yielding strength and strain hardening exponent of the films were therefore obtained, which showed a good agreement with the published data.

[1]  P. Haušild,et al.  On the identification of stress–strain relation by instrumented indentation with spherical indenter , 2012 .

[2]  William D. Nix,et al.  Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films , 1992 .

[3]  O. Kraft,et al.  Deformation behavior of thin copper films on deformable substrates , 2001 .

[4]  D. Tabor A simple theory of static and dynamic hardness , 1948, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[5]  George M. Pharr,et al.  On the measurement of yield strength by spherical indentation , 2006 .

[6]  William D. Nix,et al.  Mechanical properties of compositionally modulated Au-Ni thin films: Nanoindentation and microcantilever deflection experiments , 1994 .

[7]  Baoxing Xu,et al.  Determining engineering stress-strain curve directly from the load-depth curve of spherical indentation test , 2010 .

[8]  Te-Hua Fang,et al.  Nanomechanical properties of copper thin films on different substrates using the nanoindentation technique , 2003 .

[9]  W. Nix,et al.  A microbeam bending method for studying stress–strain relations for metal thin films on silicon substrates , 2004 .

[10]  Liangchi Zhang,et al.  Mechanical behaviour characterisation of silicon and effect of loading rate on pop-in: A nanoindentation study under ultra-low loads , 2009 .

[11]  D. Kwon,et al.  Optimum definition of true strain beneath a spherical indenter for deriving indentation flow curves , 2006 .

[12]  David T. Read,et al.  A new method for measuring the strength and ductility of thin films , 1993 .

[13]  Joost J. Vlassak,et al.  Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation , 2009 .

[14]  Xin Zhang,et al.  Nanoindentation stress–strain curves of plasma-enhanced chemical vapor deposited silicon oxide thin films , 2008 .

[15]  C. Mitterer,et al.  Can micro-compression testing provide stress-strain data for thin films?A comparative study using Cu, VN, TiN and W coatings , 2009 .

[16]  Guifu Ding,et al.  A new method for the micro-tensile testing of thin film , 2008, 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[17]  Chengkuo Lee,et al.  All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications. , 2014, Nanoscale.

[18]  Julia R. Greer,et al.  Tensile and compressive behavior of tungsten, molybdenum, tantalum and niobium at the nanoscale , 2010 .

[19]  G. Pharr,et al.  Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology , 2004 .

[20]  Bharat Bhushan,et al.  Measurement of fracture toughness of ultra-thin amorphous carbon films , 1998 .

[21]  G. Pharr,et al.  Influence of indenter tip geometry on elastic deformation during nanoindentation. , 2005, Physical review letters.

[22]  Dongil Kwon,et al.  Derivation of plastic stress–strain relationship from ball indentations: Examination of strain definition and pileup effect , 2001 .

[23]  B. Galanov,et al.  Plasticity characteristic obtained through hardness measurement , 1993 .

[24]  D. Kwon,et al.  Determination of tensile properties by instrumented indentation technique: Representative stress and strain approach , 2006 .

[25]  R. L. Edwards,et al.  Comparison of tensile and bulge tests for thin-film silicon nitride , 2004 .

[26]  F. Kosel,et al.  New analytical procedure to determine stress-strain curve from spherical indentation data , 1998 .

[27]  William D. Callister,et al.  Fundamentals of Materials Science and Engineering: An Integrated Approach, 2nd Edition , 2004 .

[28]  J. Esteve,et al.  Nanoindentation stress–strain curves as a method for thin-film complete mechanical characterization: application to nanometric CrN/Cr multilayer coatings , 2003 .

[29]  A. Zdunek,et al.  A theoretical study of the Brinell hardness test , 1989, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.