Feasibility study of a micromachined single-axis vibratory gyroscope using piezoelectric PNZT thin films for actuation and sensing

Vibratory gyroscopes measure the angular velocity of a system by making use of the Coriolis effect. We have proposed a new design using double-sided piezoelectric Nb-doped Pb(Zr20, Ti80)O3 films for actuation as well as sensing of a rate gyroscope. This design has the potential to increase the resolution of the device by increasing the mass of the gyro, that is, produce a meso-scale gyro using MEMS technology. Further, it could increase output signal amplitude by generating a higher Coriolis force, since PNZT films exhibit higher values of the effective transverse and longitudinal piezoelectric coefficients than some other piezoelectric materials. A three-dimensional finite element code, 'BAMAFEM', for dynamic analysis of gyroscopes was developed in-house. Validity of the new design was confirmed by simulations. The resonance frequency of the gyroscope was measured to be 12.60 kHz, which matches very well with the simulated results. In this paper are described the design and simulation of the gyroscope, the fabrication process, and testing of the device.

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