Solution-process coating of vertical ZnO nanowires with ferroelectrics

We have developed a modified misted deposition process by combining substrate and mist heating for the deposition of ferroelectrics on 3D nanostructures. Arrays of vertical ZnO nanowires, sputter coated with Pd bottom electrodes, are used as the substrate. Scanning electron microscopy investigations show that conformal coating of ferroelectric Pb(Zr,Ti)O3 (PZT) with good step coverage is obtained at deposition temperatures above 140 °C. The substrate heating also eliminates the common ‘bundling’ problem of the nanowire arrays. On the basis of data on x-ray diffraction, energy dispersive x-ray spectroscopy, and P–E hysteresis of PZT films on flat substrates, we obtain the optimum substrate temperature window to be 180–220 °C, in terms of best step coverage and an evident ferroelectricity. This is a significant step towards the end-goal of fully integrated ZnO nanowires with ferroelectric capacitors, which may be useful for the light-emitting applications of ZnO.

[1]  F. Morrison,et al.  LIQUID SOURCE MISTED CHEMICAL DEPOSITION PROCESS OF THREE-DIMENSIONAL NANO-FERROELECTRICS WITH SUBSTRATE HEATING , 2007 .

[2]  F. Morrison,et al.  Conformal oxide coating of carbon nanotubes , 2007, 0706.2998.

[3]  Xin Li,et al.  Synthesis of ordered arrays of multiferroic NiFe2O4-Pb(Zr0.52Ti0.48)O3 core-shell nanowires , 2007 .

[4]  J. Scott,et al.  Applications of Modern Ferroelectrics , 2007, Science.

[5]  C. Li,et al.  Synthesis and electronic properties of transition metal oxide core–shell nanowires , 2007 .

[6]  U. Gösele,et al.  Laser-interference lithography tailored for highly symmetrically arranged ZnO nanowire arrays. , 2007, Small.

[7]  X. Lou,et al.  Local phase decomposition as a cause of polarization fatigue in ferroelectric thin films. , 2006, Physical review letters.

[8]  Margit Zacharias,et al.  Ferroelectric nanotubes fabricated using nanowires as positive templates , 2006 .

[9]  Walter Riess,et al.  Nanowire-based one-dimensional electronics , 2006 .

[10]  T. Mayer,et al.  Fabrication of High Aspect Ratio Ferroelectric Microtubes by Vacuum Infiltration using Macroporous Silicon Templates , 2006 .

[11]  Alexei Gruverman,et al.  Nanoscale ferroelectrics: processing, characterization and future trends , 2006 .

[12]  M. Ritala,et al.  Atomic Layer Deposition of Ferroelectric Bismuth Titanate Bi4Ti3O12 Thin Films , 2006 .

[13]  Margit Zacharias,et al.  Semiconductor nanowires: from self-organization to patterned growth. , 2006, Small.

[14]  Martin Steinhart,et al.  Lead titanate nano- and microtubes , 2006 .

[15]  R. Könenkamp,et al.  Ultraviolet electroluminescence from ZnO/polymer heterojunction light-emitting diodes. , 2005, Nano letters.

[16]  U. Gösele,et al.  Local luminescence of ZnO nanowire-covered surface: A cathodoluminescence microscopy study , 2005 .

[17]  Jiyan Dai,et al.  Synthesis and piezoresponse of highly ordered Pb(Zr0.53Ti0.47)O3 nanowire arrays , 2004 .

[18]  T. Shiosaki,et al.  Improvement in Homogeneity and Ferroelectric Property of Mist Deposition Derived Pb(Zr,Ti)O3 Thin Films by Substrate Surface Treatment , 2004 .

[19]  Y. Wang,et al.  Synthesis and characterization of micro/nanoscopic Pb(Zr0.52Ti0.48)O3 fibers by electrospinning , 2004 .

[20]  F. Morrison,et al.  LETTER TO THE EDITOR: High aspect ratio piezoelectric strontium bismuth tantalate nanotubes , 2003 .

[21]  Ralf B. Wehrspohn,et al.  Nanoshell tubes of ferroelectric lead zirconate titanate and barium titanate , 2003 .

[22]  E. R. Fisher,et al.  Sol-gel template synthesis and characterization of BaTiO3 and PbTiO3 nanotubes , 2002 .

[23]  S. Nourbakhsh,et al.  Novel polyol-derived sol route for fabrication of PZT thin ferroelectric films , 1999 .

[24]  Carlos A. Paz de Araujo,et al.  Second generation liquid source misted chemical deposition (LSMCD) technology for ferroelectric thin films , 1997 .

[25]  I-Wei Chen,et al.  Temperature–Time Texture Transition of Pb(Zr1−xTix)O3 Thin Films: II, Heat Treatment and Compositional Effects , 1994 .

[26]  P. Couturier.  Japan , 1988, The Lancet.

[27]  C. Araujo,et al.  Conformal LSMCD deposition of SrBi2(Ta1-xNbx)2O9 , 1997 .