论文信息 - Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform. - 字舞流文

Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform.

G. Lo | D. Kwong | B. Dong | Chengkuo Lee | Xianshu Luo | S. Chua | K. Ang | Shiyang Zhu | Li Zhang | D. Hasan | Mo Li | Yiming Ma | Philippe Vachon | Ting Hu | Jingxuan Wei | Yuhua Chang