论文信息 - A passive method to compensate nonlinearity in a homodyne interferometer.

A passive method to compensate nonlinearity in a homodyne interferometer.

This study presents an analysis of the nonlinearity resulting from polarization crosstalk at a polarizing beam splitter (PBS) and a wave plate (WP) in a homodyne interferometer. From a theoretical approach, a new compensation method involving a realignment of the axes of WPs to some specific angles according to the characteristics of the PBS is introduced. This method suppresses the nonlinearity in a homodyne interferometer to 0.36 nm, which would be 3.75 nm with conventional alignment methods of WPs.

[1] Gaoliang Dai,et al. Improving the performance of interferometers in metrological scanning probe microscopes , 2004 .

[2] Serge Dubovitsky,et al. Polarization compensation: a passive approach to a reducing heterodyne interferometer nonlinearity. , 2002, Optics letters.

[3] Gwo-Sheng Peng,et al. Correction of nonlinearity in one-frequency optical interferometry , 1996 .

[4] Kyuwon Jeong,et al. The dynamic compensation of nonlinearity in a homodyne laser interferometer , 2001 .

[5] Ichiko Misumi,et al. Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system. , 2005, Applied optics.

[6] P L Heydemann,et al. Determination and correction of quadrature fringe measurement errors in interferometers. , 1981, Applied optics.

[7] Kiyoshi Takamasu,et al. Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope , 2003 .

[8] Konrad Herrmann,et al. A neural network approach to correcting nonlinearity in optical interferometers , 2003 .