论文信息 - Design and analysis of resonant based gas sensor

Design and analysis of resonant based gas sensor

This paper presents modeling and simulation of micro cantilever based resonant sensor which uses piezoelectric excitation and detection. Length and width analysis is carried out for maximum displacement at resonance. The proposed design is tested for mass sensitiveness, with conditioning electronics using Coventorware.

[1] Udo Weimar,et al. Fabrication of micromechanical mass-sensitive resonators with increased mass resolution using SOI substrate , 2002 .

[2] Isabelle Dufour,et al. Resonant microcantilever type chemical sensors: analytical modeling in view of optimization , 2003 .

[3] Jian Zhang,et al. Tuning forks as micromechanical mass sensitive sensors for bio- or liquid detection , 2003 .

[4] Rastko R. Selmic,et al. Simulation and design of piezoelectric microcantilever chemical sensors , 2005 .