论文信息 - Peculiarities of latent track etching in SiO2/Si structures irradiated with Ar, Kr and Xe ions - 字舞流文

Peculiarities of latent track etching in SiO2/Si structures irradiated with Ar, Kr and Xe ions

F. Komarov | M. Zdorovets | L. Vlasukova | A. Dauletbekova | A. Akilbekov | A. Alzhanova | V. N. Yuvchenko