Mold Design and Fabrication for Surface Relief Gratings by Glass Nanoimprint

Mold shape has been optimized to fabricate one-dimensional glass gratings with a high aspect ratio. Comparison of experimental and simulated results demonstrated that a periodic groove with a tilted sidewall, a parabolic top tooth, and a large width was preferable to imprint high-aspect-ratio gratings on a glass surface. In particular, a mold with a parabolic top tooth and a wide groove was effective to increase the aspect ratio. In the case of a mold with a 500 nm period, a grating of 540 nm height could be imprinted under the respectively optimized imprinting parameters of 430 °C, 5 MPa, and 5 min.

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