RuO2-based Low Temperature Sensors with “Tuned” Resistivity Dependencies

The paper presents low temperature properties of RuO2-based thick film resistors (temperature sensors) prepared from DuPont paste under various technology conditions. It is shown that the temperature dependence of their resistance R(T), in the case when all sensors are prepared from the same starting paste, can be strongly influenced by the manufacturing process (above all by the firing temperature and firing time). The paper also presents the results on the low temperature magnetic field dependence of RuO2-based sensors.