Microwave MEMS devices designed for process robustness and operational reliability

This paper presents an overview on novel microwave micro-electromechanical systems (MEMS) device concepts developed in our research group during the last 5 years, which are specifically designed fo ...

[1]  J. Oberhammer,et al.  Deep-Reactive-Ion-Etched Wafer-Scale-Transferred All-Silicon Dielectric-Block Millimeter-Wave MEMS Phase Shifters , 2010, Journal of Microelectromechanical Systems.

[2]  J. Oberhammer,et al.  Binary-Coded 4.25-bit $W$-Band Monocrystalline–Silicon MEMS Multistage Dielectric-Block Phase Shifters , 2009, IEEE Transactions on Microwave Theory and Techniques.

[3]  S. Dudorov,et al.  Millimetre Wave Phase Shifters Based on a Metal Waveguide with a MEMS-Based High-Impedance Surface , 2006, 2006 European Microwave Conference.

[4]  Chang Liu,et al.  Foundations of MEMS , 2006 .

[5]  G. Stemme,et al.  Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bonding , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[6]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[7]  Eric Beyne,et al.  MEMS for wireless communications: 'from RF-MEMS components to RF-MEMS-SiP' , 2003 .

[8]  V. Ziegler,et al.  Very low complexity RF-MEMS technology for wide range tunable microwave filters , 2005, 2005 European Microwave Conference.

[9]  M. Madou.  Fundamentals of microfabrication : the science of miniaturization , 2002 .

[10]  K. Leedy,et al.  Selecting metal alloy electric contact materials for MEMS switchesThe views expressed in this paper , 2004 .

[11]  J. R. Reid,et al.  Measurements of charging in capacitive microelectromechanical switches , 2002 .

[12]  J. Schmitz,et al.  Time and voltage dependence of dielectric charging in RF MEMS capacitive switches , 2007, 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual.

[13]  D. Lederer,et al.  New substrate passivation method dedicated to HR SOI wafer fabrication with increased substrate resistivity , 2005, IEEE Electron Device Letters.

[14]  Jianmin Miao,et al.  Control of stress in highly doped polysilicon multi-layer diaphragm structure , 2001 .

[15]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[16]  L. L. Mercado,et al.  A mechanical approach to overcome RF MEMS switch stiction problem , 2003, 53rd Electronic Components and Technology Conference, 2003. Proceedings..

[17]  T. Umemoto,et al.  The Behavior of Surface Oxide Film on Ruthenium and Rhodium Plated Contacts , 1978 .

[18]  Gabriel M. Rebeiz,et al.  Distributed 2- and 3-bit W-band MEMS phase shifters on glass substrates , 2004, IEEE transactions on microwave theory and techniques.

[19]  J. Lang,et al.  {111} Si Etched Planar Electrical Contacts for Power MEMS-relays , 2007, Electrical Contacts - 2007 Proceedings of the 53rd IEEE Holm Conference on Electrical Contacts.

[20]  W. Johler.  Precious metal-reduced contact materials in telecom- and signal relays , 2001, Proceedings of the Forth-Seventh IEEE Holm Conference on Electrical Contacts (IEEE Cat. No.01CH37192).

[21]  Kristofer S. J. Pister,et al.  Microrelays for batch transfer integration in RF systems , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[22]  P. Slade,et al.  The use of Ag-W-CdO and AgSi 3 N 4 as Contact Materials , 1976 .

[23]  Klas Hjort,et al.  Diamond and Amorphous Carbon MEMS , 2001 .

[24]  C. Nguyen,et al.  MEMS technology for timing and frequency control , 2005, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005..

[25]  Peter Enoksson,et al.  Low-temperature wafer-level transfer bonding , 2001 .

[26]  Joachim Oberhammer,et al.  Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration , 2010, IEEE Transactions on Electron Devices.

[27]  S. Duffy,et al.  MEMS microswitches for reconfigurable microwave circuitry , 2001, IEEE Microwave and Wireless Components Letters.

[28]  A. Crunteanu,et al.  Charging in Dielectricless Capacitive RF-MEMS Switches , 2009, IEEE Transactions on Microwave Theory and Techniques.

[29]  J. Oberhammer,et al.  Multi-position large tuning-range digitally tuneable capacitors embedded in 3D micromachined transmission lines , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[30]  Elliott R. Brown,et al.  RF-MEMS switches for reconfigurable integrated circuits , 1998 .

[31]  J. Oberhammer,et al.  Micro-fabricated high-impedance surface for millimeter wave beam steering applications , 2008, 2008 33rd International Conference on Infrared, Millimeter and Terahertz Waves.

[32]  J. Oberhammer,et al.  Active Opening Force and Passive Contact Force Electrostatic Switches for Soft Metal Contact Materials , 2006, Journal of Microelectromechanical Systems.

[33]  Hao Xin,et al.  Ka-band waveguide phase shifter using tunable electromagnetic crystal sidewalls , 2003 .

[34]  Herbert Shea,et al.  MEMS Reliability , 2010 .

[35]  Ignacio Llamas-Garro,et al.  Micromachined Transmission Lines for Millimeter-Wave Applications , 2006, 16th International Conference on Electronics, Communications and Computers (CONIELECOMP'06).

[36]  Yun Sun Lee,et al.  High isolation RF MEMS contact switch in V and W-bands using two directional motions , 2010 .

[37]  John Papapolymerou,et al.  Reconfigurable double-stub tuners using MEMS switches for intelligent RF front-ends , 2003 .

[38]  Guan-Leng Tan,et al.  RF MEMS phase shifters: design and applications , 2002 .

[39]  T. Fujita,et al.  SOI-MEMS Sensor for Multi-Environmental Sensing-System , 2007, 2007 Fourth International Conference on Networked Sensing Systems.

[40]  Gabriel M. Rebeiz,et al.  Intermodulation distortion and power handling in RF MEMS switches, varactors, and tunable filters , 2003 .

[41]  N. Somjit,et al.  Monocrystalline-Silicon Microwave MEMS Devices , 2010 .

[42]  John P. Sullivan,et al.  Performance of amorphous diamond RF MEMS capacitive switch , 2004 .

[43]  Ai Qun Liu,et al.  Mechanically tri-stable, true single-pole-double-throw (SPDT) switches , 2006 .

[44]  J. Oberhammer,et al.  Nanometer-scale flatness and reliability investigation of stress-compensated symmetrically-metallized monocrystalline-silicon multi-layer membranes , 2010, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems.

[45]  Songcheol Hong,et al.  A low voltage actuated micromachined microwave switch using torsion springs and leverage , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[46]  N Somjit,et al.  Power Handling Analysis of High-Power $W$ -Band All-Silicon MEMS Phase Shifters , 2011, IEEE Transactions on Electron Devices.

[47]  L.P.B. Katehi,et al.  A study of thermal effects in RF-MEM-switches using a time domain approach , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[48]  E. Walczuk,et al.  Experimental Study of Ag-W-Re Composite Materials Under High-Current Conditions , 1987 .

[49]  M. Sakata,et al.  Micromachined relay which utilizes single crystal silicon electrostatic actuator , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[50]  C. Wen.  Coplanar Waveguide, a Surface Strip Transmission Line Suitable for Nonreciprocal Gyromagnetic Device Applications , 1969 .

[51]  Tomas Zvolensky,et al.  Beam-steering MEMS-loaded antenna based on planar transmission lines , 2010, Proceedings of the Fourth European Conference on Antennas and Propagation.

[52]  Gabriel M. Rebeiz,et al.  W-band CPW RF MEMS circuits on quartz substrates , 2003 .

[53]  J. Oberhammer,et al.  A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm , 2008, Journal of Microelectromechanical Systems.

[54]  J. Oberhammer,et al.  RF MEMS High-Impedance Tuneable Metamaterials for Millimeter-Wave Beam Steering , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[55]  Hongrui Jiang,et al.  On-chip spiral inductors suspended over deep copper-lined cavities , 2000 .

[56]  M. Wu,et al.  Angular vertical comb-driven tunable capacitor with high-tuning capabilities , 2004, Journal of Microelectromechanical Systems.

[57]  D. Kauzlarick,et al.  Fundamentals of microfabrication, the science of miniaturization, 2nd edition [Book Review] , 2003, IEEE Engineering in Medicine and Biology Magazine.

[58]  Michael Hietschold,et al.  Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) , 1998 .

[59]  S. Umemura,et al.  Contact resistance characteristics of noble metal alloys for connector contacts , 1991 .

[60]  D. Peroulis,et al.  DC-65 GHz characterization of nanocrystalline diamond leaky film for reliable RF MEMS switches , 2005, 2005 European Microwave Conference.

[61]  J. Oberhammer,et al.  Electrochemically Assisted Maskless Selective Removal of Metal Layers for Three-Dimensional Micromachined SOI RF MEMS Transmission Lines and Devices , 2011, Journal of Microelectromechanical Systems.

[62]  A. Lazaro,et al.  Study of intermodulation in RF MEMS variable capacitors , 2006, IEEE Transactions on Microwave Theory and Techniques.

[63]  G. Kovacs.  Micromachined Transducers Sourcebook , 1998 .

[64]  Gabriel M. Rebeiz,et al.  Very low-loss distributed X-band and Ka-band MEMS phase shifters using metal-air-metal capacitors , 2003 .

[65]  Jung-Chih Chiao,et al.  MEMS millimeterwave components , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[66]  Guann-Pyng Li,et al.  Monolithic integration of RF MEMS switches with a diversity antenna on PCB substrate , 2003 .