압전소자와 충격구동 메커니즘을 이용한 초정밀 회전장치

This paper describes the design, construction, and fundamental testing of a precision rotational device that utilizes piezoelectric elements as a source of driving force and impact drive mechanism as a driving principle. A novel device structure is designed and the numerical simulations about the static displacement, stress distribution, and mode shape of the designed structure are performed. A fabricated rotational device has been rotated successfully by applying saw-shaped voltages to the piezoelectric elements. The one-step rotational angle was 0.44×10 -3 rad at the applied voltages of 80V. The angular velocities of the device were revealed to be increased as the driving frequency and voltage were respectively increased and the preload was decreased. The device has a feature that it can be translated as well as rotated. An experimental result shows that the device was translated by ±4.56㎛ maximum when the 120V sinusoidal voltages with a phase difference of 180° were respectively supplied to two piezoelectric elements.