Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens

We report improved results for hard x-ray focusing using a multilayer Laue lens MLL. We have measured a line focus of 16 nm width with an efficiency of 31% at a wavelength =0.064 nm 19.5 keV using a partial MLL structure with an outermost zone width of 5 nm. The results are in good agreement with the theoretically predicted performance. © 2008 American Institute of

[1]  B. Lengeler,et al.  Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses. , 2005, Physical review letters.

[2]  Janos Kirz,et al.  Phase zone plates for x rays and the extreme uv , 1974 .

[3]  A. Authier.  Dynamical theory of x-ray diffraction , 2001 .

[4]  J. F. van der Veen,et al.  Focusing x-ray beams to nanometer dimensions. , 2003, Physical review letters.

[5]  Jörg Maser,et al.  Coupled wave description of the diffraction by zone plates with high aspect ratios , 1992 .

[6]  A. Macrander,et al.  Depth-graded multilayers for application in transmission geometry as linear zone plates , 2005 .

[7]  Jörg Maser,et al.  Sectioning of multilayers to make a multilayer Laue lens. , 2007, The Review of scientific instruments.

[8]  Q. Shen,et al.  Takagi-taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture. , 2007, 0704.3982.

[9]  J. Bongaerts,et al.  Focusing of coherent X-rays in a tapered planar waveguide , 2000 .

[10]  Albert T. Macrander,et al.  Film stress studies and the multilayer Laue lens project , 2006, SPIE Optics + Photonics.

[11]  Yiping Wang,et al.  Interface roughness evolution in sputtered WSi2∕Si multilayers , 2007 .

[12]  T. Ishikawa,et al.  Efficient focusing of hard x rays to 25nm by a total reflection mirror , 2007 .

[13]  C. Schroer.  Focusing hard x rays to nanometer dimensions using Fresnel zone plates , 2006 .

[14]  H. C. Kang,et al.  Nanometer linear focusing of hard x rays by a multilayer Laue lens. , 2006, Physical review letters.

[15]  M. Burghammer,et al.  Hard x-ray nanoprobe based on refractive x-ray lenses , 2005 .

[16]  F. Pfeiffer,et al.  Nanometer focusing properties of Fresnel zone plates described by dynamical diffraction theory , 2006 .

[17]  W. Yun,et al.  30 nm resolution x-ray imaging at 8 keV using third order diffraction of a zone plate lens objective in a transmission microscope , 2006 .

[18]  P. Cloetens,et al.  Efficient sub 100 nm focusing of hard x rays , 2005 .

[19]  Hidekazu Mimura,et al.  At-wavelength figure metrology of hard x-ray focusing mirrors , 2006 .