Finite Element Analysis of the Electrical Parameters of Micro Quartz Tuning Fork

Taking Ushape tuningfork as an example and by simulating electrode through coupling voltage freedom, the static lumped capacitance model of quartz tuning forks is presented. Static capacitance parameters are then calculated by means of the static analytic method of finite element analysis. By treating the electrodes as opencircuits and shortcircuits, and using the modal and harmonic analytic methods respectively, inherent frequencies of tuning fork are computed, and the results from the two methods are seen to be coincident. Based on the inherent frequencies the dynamic equivalent circuit parameters are calculated and the result is within the discrete range of experimental values. Finaly, through modal and harmonic analysis, the voltage and charge sensitivity of quartz tuning fork sensors are calculated, which provide a necessary reference for the amplifier design of sensors.