Correlation between reliability of thermal oxides and dislocations in n-type 4H-SiC epitaxial wafers
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Kenji Fukuda | Tomohisa Kato | K. Fukuda | J. Senzaki | Atsushi Shimozato | K. Kojima | Tomohisa Kato | Kazutoshi Kojima | Junji Senzaki | Atsushi Shimozato
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