论文信息 - Multiple Input Microcantilever Sensor with Capacitive Readout

Multiple Input Microcantilever Sensor with Capacitive Readout

A surface-micromachined MEMS process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Combined hydrogen and mercury-vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.

[1] Thomas Thundat,et al. Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers , 1995 .

[2] Thomas Thundat,et al. Viscous drag measurements utilizing microfabricated cantilevers , 1996 .

[3] Stephen F. Smith,et al. Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing , 1999, Proceedings 20th Anniversary Conference on Advanced Research in VLSI.

[4] Thomas Thundat,et al. Vapor detection using resonating microcantilevers , 1995 .

[5] J. M. Rochelle,et al. MEMS sensors and wireless telemetry for distributed systems , 1998, Smart Structures.