Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces.

A point diffraction interferometer (PDI) with adjustable fringe contrast is presented for the high-precision testing of spherical surfaces. The polarizing components are employed in the PDI to transform the polarization states of the test and reference beams, and a good fringe contrast can be realized by adjusting the relative intensities of interfering waves. The proposed system is compact and simple in structure, and it provides a feasible way for high-precision testing of spherical surfaces with low reflectivity. The theory of the interferometer is introduced in detail, along with the properties of optical components employed in the system, numerical analysis of systematic error, and the corresponding calibration procedure. Compared with the testing results of the ZYGO interferometer, a high accuracy with RMS value about 0.0025λ is achieved with the proposed interferometer. Finally, the error consideration in the experiment is discussed.

[1]  Katsuhiko Murakami,et al.  Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL , 2004, SPIE Optics + Photonics.

[2]  Seiji Takeuchi,et al.  Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems , 2005, SPIE Optics + Photonics.

[3]  Z Wang,et al.  Polarization pinhole interferometer. , 1991, Optics letters.

[4]  Kazuya Ota,et al.  Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror , 2002 .

[5]  Yasushi Oshikane,et al.  Measurement Accuracy in Phase-Shifting Point Diffraction Interferometer with Two Optical Fibers , 2007 .

[6]  Joseph M. Geary,et al.  Modeling point diffraction interferometers , 1995, Optics & Photonics.

[7]  R. N. Smartt,et al.  Theory and Application of Point-Diffraction Interferometers , 1975 .

[8]  Jie Li,et al.  Flat surface measurements on fiber point diffraction interferometer , 2010 .

[9]  A comparison of the vectorial nonparaxial approach with Fresnel and Fraunhofer approximations , 2004 .

[10]  W C Liu,et al.  Vector diffraction from subwavelength optical disk structures: two-dimensional modeling of near-field profiles, far-field intensities, and detector signals from a DVD. , 1999, Applied optics.

[11]  Kazuya Ota,et al.  Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation , 2002 .

[12]  Qian Gong,et al.  Alignment and testing of piston and aberrations of a segmented mirror , 2005, SPIE Optics + Photonics.

[13]  Kazuya Ota,et al.  Aspherical mirror measurement using a point diffraction interferometer , 2002, SPIE Advanced Lithography.

[14]  Andrew R. Neureuther,et al.  Rigorous three-dimensional time-domain finite-difference electromagnetic simulation , 1995 .

[15]  N. I. Chkhalo,et al.  Manufacturing and investigation of objective lens for ultrahigh resolution lithography facilities , 2008, International Conference on Micro- and Nano-Electronics.

[16]  Hagyong Kihm,et al.  Oblique fiber optic diffraction interferometer for testing spherical mirrors , 2005 .

[17]  Wei-Quan Zhang,et al.  New phase shift formulas and stability of waveplate in oblique incident beam , 2000 .

[18]  Kazuto Yamauchi,et al.  Spherical concave mirror measurement by phase-shifting point diffraction interferometer with two optical fibers , 2010 .

[19]  J. Wyant,et al.  Polarization phase-shifting point-diffraction interferometer. , 2006 .

[20]  W Q Zhang,et al.  General ray-tracing formulas for crystal. , 1992, Applied optics.

[21]  Daniel Malacara,et al.  Newton, Fizeau, and Haidinger Interferometers , 2006 .