论文信息 - A compact tactile surface profiler for multi-sensor applications in nano measuring machines

A compact tactile surface profiler for multi-sensor applications in nano measuring machines

A tactile surface profiler was developed for applications in the nano measuring machine NMM-1. To enable its utilization as part of a multi-sensor concept in an automated sensor changer, a compact design was necessary. The profiler uses a flexure guide made from two circular steel membranes as suspension for the stylus and a focus sensor system to measure its deflection. The profiler was integrated into a NMM-1 to prove its function and investigate its metrological properties. Measurements of different samples showed a reproducibility of few nanometers.

Eberhard Manske | René Theska | Rostyslav Mastylo | Norbert Hofmann

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