Performance of Commercial CMOS Foundry-Compatible Multijunction Thermal Converters

We report on the performance of multijunction thermal converters (MJTCs) fabricated using commercial CMOS integrated circuit (Ie) foundries through MOSIS.2 Calibration testing shows that the devices are suitable for the measurement of ac voltage, current, and power for frequencies above audio using conventional thermal transfer techniques. These devices show promise for applications as low-cost, high-precision RF and microwave power sensors with integrated electronics. The fabrication methodology allows easy integration with VLSI microcircuits using standard design libraries leading to low-cost, foundry-independent products.