Study on precision PZT rotary step actuator with inner anchor/loosen

A new precision rotary PZT actuator was proposed to improve its drive capabilities.Based on the piezoelectric(PZT) technology and the bionical principle,the PZT actuator uses a stator inner anchor/loosen and a distortion structure of thin shelf flexible hinge to improve the stability of anchor/loosen and step rotary.With a characteristic analysis from the finite element method,the results show that the new rotary PZT actuator works with high frequency(40 Hz),high speed(325 μrad/s),large travel(360°),high resolution(1 μrad/step) and high torque(30 N·cm) and it will be suitable for application to large travel and high resolution driving device,optical engineering,precision positioning and some micro-manipulation field.