High‐speed serial‐kinematic SPM scanner: design and drive considerations

This paper describes the design of a flexure-guided, two-axis nanopositioner (scanner) driven by piezoelectric stack actuators. The scanner is specifically designed for high-speed scanning probe microscopy (SPM) applications, such as atomic force microscopy (AFM). A high-speed AFM scanner is an essential component for acquiring high-resolution, three-dimensional, time-lapse images of fast processes such as the rapid movement of cells and the diffusion of DNA molecules. A two-axis SPM scanner is proposed, where the slow and fast scanning axes are serially connected and flexure guided to minimize runout. The scanner's achievable scan range is approximately 10µm × 10µm. Finite element analysis is utilized to optimize the mechanical resonance frequencies of the scanner. Experimental results show a first major resonance in the slow and fast axis at 1.5 and 29 kHz, respectively. This paper also discusses the various tradeoffs between speed, range, electrical requirements, and scan trajectory design for high-speed nanopositioning. Copyright © 2009 John Wiley and Sons Asia Pte Ltd and Chinese Automatic Control Society

[1]  D. Croft,et al.  Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application , 2001 .

[2]  Santosh Devasia,et al.  Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators , 2007, IEEE Transactions on Control Systems Technology.

[3]  G. Schitter Advanced Mechanical Design and Control Methods for Atomic Force Microscopy in Real-Time , 2007, 2007 American Control Conference.

[4]  A. Fleming,et al.  Evaluation of charge drives for scanning probe microscope positioning stages , 2008, 2008 American Control Conference.

[5]  M. Horton,et al.  Breaking the speed limit with atomic force microscopy , 2007 .

[6]  Andrew J. Fleming,et al.  Optimal input signals for bandlimited scanning systems , 2008 .

[7]  Jacqueline A. Cutroni,et al.  Rigid design of fast scanning probe microscopes using finite element analysis. , 2004, Ultramicroscopy.

[8]  Yang Li,et al.  Feedforward control of a closed-loop piezoelectric translation stage for atomic force microscope. , 2007, The Review of scientific instruments.

[9]  M. J. Rost,et al.  Scanning probe microscopes go video rate and beyond , 2005 .

[10]  Warren P. Seering,et al.  Slewing Flexible Spacecraft with Deflection-Limiting Input shaping , 1997 .

[11]  Andrew J. Fleming,et al.  Evaluation of charge drives for scanning probe microscope positioning stages , 2008, ACC.

[12]  S. O. Reza Moheimani,et al.  Piezoelectric Transducers for Vibration Control and Damping , 2006 .

[13]  Karl Johan Åström,et al.  Design and Modeling of a High-Speed AFM-Scanner , 2007, IEEE Transactions on Control Systems Technology.

[14]  E. Snow,et al.  Nanofabrication with proximal probes , 1996, Proc. IEEE.

[15]  Mervyn J Miles,et al.  Ultrahigh-speed scanning near-field optical microscopy capable of over 100 frames per second , 2003 .

[16]  T. Ando,et al.  High-speed Atomic Force Microscopy for Capturing Dynamic Behavior of Protein Molecules at Work , 2005 .

[17]  Georg Schitter,et al.  Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy , 2004, IEEE Transactions on Control Systems Technology.

[18]  P K Hansma,et al.  Direct observation of one-dimensional diffusion and transcription by Escherichia coli RNA polymerase. , 1999, Biophysical journal.

[19]  William D. Callister,et al.  Materials Science and Engineering: An Introduction , 1985 .

[20]  Daisuke Maruyama,et al.  A High-Speed Atomic Force Microscope for Studying Biological Macromolecules in Action , 2002, Chemphyschem : a European journal of chemical physics and physical chemistry.