Review of electronic speckle pattern interferometry (ESPI) for three dimensional displacement measurement

Three dimensional(3D) displacements, which can be translated further into 3D strain, are key parameters for design, manufacturing and quality control. Using different optical setups, phase-shift methods, and algorithms, several different 3D electronic speckle pattern interferometry(ESPI) systems for displacement and strain measurements have been achieved and commercialized. This paper provides a review of the recent developments in ESPI systems for 3D displacement and strain measurement. After an overview of the fundamentals of ESPI theory, temporal phase-shift, and spatial phase-shift techniques, 3D deformation measurements by the temporal phase-shift ESPI system, which is suited well for static measurement, and by the spatial phase-shift ESPI system, which is particularly useful for dynamic measurement, are discussed. For each method, the basic theory, a brief derivation and different optical layouts are presented. The state of art application, potential and limitation of the ESPI systems are shown and demonstrated.

[1]  Michelson interferometer based spatial phase shift shearography. , 2013, Applied optics.

[2]  M Sjödahl,et al.  Three-dimensional deformation field measurements with simultaneous TV holography and electronic speckle photography. , 1997, Applied optics.

[3]  Yu Fu,et al.  Determination of instantaneous curvature and twist by digital shearography , 2012 .

[4]  Roger Xu,et al.  Cluster approach based multi-camera digital image correlation: Methodology and its application in large area high temperature measurement , 2014 .

[5]  Juan A Rayas,et al.  Three-dimensional deformation measurement from the combination of in-plane and out-of-plane electronic speckle pattern interferometers. , 2004, Applied optics.

[6]  Gordon M. Brown,et al.  Guest Editorial: Special Section on Optical Methods for Shape Measurement , 2000 .

[7]  Lianxiang Yang,et al.  Strain measurement by three-dimensional electronic speckle pattern interferometry: potentials, limitations, and applications , 2003 .

[8]  K. Jambunathan,et al.  Measurement of three‐dimensional surface shape and deformations using phase stepping speckle interferometry , 1996 .

[9]  Lianxiang Yang,et al.  High temperature displacement and strain measurement using a monochromatic light illuminated stereo digital image correlation system , 2012 .

[10]  Matias R Viotti,et al.  Measurement of three-dimensional deformations using digital holography with radial sensitivity. , 2010, Applied optics.

[11]  H J Tiziani,et al.  Simultaneous three-dimensional dynamic deformation measurements with pulsed digital holography. , 1999, Applied optics.

[12]  Xin Xie,et al.  Quality Inspection of Spot Welds using Digital Shearography , 2012 .

[13]  Ervin Kolenovic,et al.  Miniaturized digital holography sensor for distal three-dimensional endoscopy. , 2003, Applied optics.

[14]  K Shibayama,et al.  Measurement of three-dimensional displacements by hologram interferometry. , 1971, Applied optics.

[15]  R S Sirohi,et al.  Spatial phase shifting for pure in-plane displacement and displacement-derivative measurements in electronic speckle pattern interferometry (ESPI). , 1997, Applied optics.

[16]  Werner Jüptner,et al.  Digital recording and numerical reconstruction of holograms , 2002 .

[17]  Mumin Song,et al.  Overview of three-dimensional shape measurement using optical methods , 2000 .

[18]  Yongqi Fu,et al.  Microfabrication of microlens array by focused ion beam technology , 2000 .

[19]  Ellis Meng,et al.  Rapid fabrication and characterization of MEMS Parylene C bellows for large deflection applications , 2012 .

[20]  Y. C. Fung,et al.  A first course in continuum mechanics : for physical and biological engineers and scientists , 1994 .

[21]  Gary Cloud,et al.  3-D Strain Fields Using Embedded DSPI: Pilot Study , 2004 .

[22]  Jingwei Tong,et al.  Study on in-plane displacement measurement under impact loading using digital speckle pattern interferometry , 1996 .

[23]  Lianqing Zhu,et al.  Real-time monitoring of phase maps of digital shearography , 2013 .

[24]  Giancarlo Pedrini,et al.  Quantitative evaluation of digital shearing interferogram using the spatial carrier method , 1996 .

[25]  H J Tiziani,et al.  Speckle interferometry with temporal phase evaluation for measuring large-object deformation. , 1998, Applied optics.

[26]  H J Tiziani,et al.  Simultaneous quantitative evaluation of in-plane and out-of-plane deformations by use of a multidirectional spatial carrier. , 1997, Applied optics.

[27]  Robert Ohlsson,et al.  The accuracy of fast 3D topography measurements , 2001 .

[28]  Lianxiang Yang,et al.  Enlarging the angle of view in Michelson-interferometer-based shearography by embedding a 4f system. , 2011, Applied optics.

[29]  Jan Burke,et al.  Performance of spatial vs. temporal phase shifting in ESPI , 1999, Other Conferences.

[30]  Ichirou Yamaguchi,et al.  Linear and rotary encoders using eletronic speckle correlation , 1991 .

[31]  M. Takeda,et al.  Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces. , 1994, Applied optics.

[32]  I. Yamaguchi,et al.  Two-Dimensional Measurement of Strain Distribution by Speckle Correlation , 1992 .

[33]  Lianxiang Yang,et al.  Digital laser microinterferometer and its applications , 2003 .

[34]  M. P. Kothiyal,et al.  Use of spatial phase shifting technique in digital speckle pattern interferometry (DSPI) and digital shearography (DS). , 2006, Optics express.

[35]  Cheol-Jung Kim,et al.  Two-channel spatial phase shifting electronic speckle pattern interferometer , 2001 .

[36]  Sheng Liu,et al.  Vibration measurement of MEMS by digital laser microinterferometer , 2005, SPIE Optics + Photonics.

[37]  Wolfgang Osten,et al.  High-speed digital holographic interferometry for vibration measurement. , 2006, Applied optics.

[38]  Chih-Kung Lee,et al.  Phase-shifting algorithms for electronic speckle pattern interferometry. , 2002, Applied optics.

[39]  M. Takeda,et al.  Frequency-multiplex Fourier-transform profilometry: a single-shot three-dimensional shape measurement of objects with large height discontinuities and/or surface isolations. , 1997, Applied optics.

[40]  V. Wilkens,et al.  Speckle intensity and phase gradients: influence on fringe quality in spatial phase shifting ESPI-systems , 1998 .

[41]  Yu Fu,et al.  Determination of curvature and twist by digital shearography and wavelet transforms. , 2005, Optics letters.

[42]  Thomas Fricke-Begemann Three-dimensional deformation field measurement with digital speckle correlation. , 2003, Applied optics.

[43]  Sheng Liu,et al.  Measurement of Strain Distributions in Mouse Femora with 3D-Digital Speckle Pattern Interferometry. , 2007, Optics and lasers in engineering.

[44]  S. Toyooka,et al.  Investigation on mechanism of plastic deformation by digital speckle pattern interferometry , 1999 .

[45]  Thomas Kreis,et al.  Digital holographic interference-phase measurement using the Fourier-transform method , 1986 .

[46]  John R. Tyrer,et al.  An electronic speckle pattern interferometer for complete in-plane displacement measurement , 1990 .

[47]  B. Hildebrand,et al.  Surface-deformation measurement using the wavefront reconstruction technique. , 1966, Applied optics.

[48]  Jingbo Zhang,et al.  Two-dimensional in-plane electronic speckle pattern interferometer and its application to residual stress determination , 1998 .

[49]  Christian Rembe,et al.  Measurement system for full three-dimensional motion characterization of MEMS , 2002 .

[50]  M. P. Kothiyal,et al.  Simultaneous measurement of out-of-plane displacement and slope using a multiaperture DSPI system and fast Fourier transform. , 2007, Applied optics.

[51]  Lianxiang Yang,et al.  Simultaneous measurement of deformation and the first derivative with spatial phase-shift digital shearography , 2013 .