论文信息 - Dilution effect of Ar/H2 on the microstructures and photovoltaic properties of nc-Si:H deposited in low frequency inductively coupled plasma - 字舞流文

Dilution effect of Ar/H2 on the microstructures and photovoltaic properties of nc-Si:H deposited in low frequency inductively coupled plasma

Luhua Xu | Shu-Chen Huang | S. Xiao | S. Xu | Min Xu | H. P. Zhou | W. S. Yan | D. Wei | Y. Guo | W. Yan