论文信息 - Four-Period Vertically Stacked SiGe/Si Channel FinFET Fabrication and Its Electrical Characteristics - 字舞流文

Four-Period Vertically Stacked SiGe/Si Channel FinFET Fabrication and Its Electrical Characteristics

Jun Luo | Wenwu Wang | Junjie Li | Qingzhu Zhang | Zhenhua Wu | Yongliang Li | Fei Zhao | Haoyan Liu | Xiaohong Cheng | Ying Zan