论文信息 - Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications

Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications

This paper reports on ultra-scaled single-crystal Si NEMS resonators (25-40 nm thick) operating in the 10-100 MHz frequency range. Their first monolithic integration at the front-end level with CMOS enables to extract the signal from background leading to possible implementation of direct/homodyne measurement, for high sensitivity sensing applications and portable systems.

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