Overview of etching technologies used for HgCdTe

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[42]  Small two-dimensional arrays of mid-wavelength infrared HgCdTe diodes fabricated by reactive ion etching-induced p-to-n-type conversion , 2003 .

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[52]  C. Wilkinson,et al.  Reactive ion etching of II-VI semiconductors using a mixture of methane and hydrogen , 1991 .

[53]  Luke F. Lester,et al.  Inductively Coupled Plasma Etching of III-V Antimonides in BCl(3)/Ar and Cl(2)/Ar , 1998 .

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