Performance of MEMS inertial sensors
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Jeffrey T. Borenstein | Anthony S. Kourepenis | Paul A. Ward | Richard D. Elliott | J. Connelly | Marc S. Weinberg
[1] Anthony S. Kourepenis,et al. Micromechanical silicon instrument and systems development at Draper Laboratory , 1996 .
[2] Kenneth Flamm,et al. Microelectromechanical Systems; A DoD Dual Use Technology Industrial Assessment. , 1995 .
[3] J. Bernstein,et al. A micromachined comb-drive tuning fork rate gyroscope , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.