Indium tin oxide overlayered waveguides for sensor applications.

The use of indium tin oxide (ITO) thin films as electrodes for integrated optical electrochemical sensor devices is discussed. The effect of various thicknesses of ITO overlayers exhibiting low resistivity and high transparency on potassium ion-exchanged waveguides fabricated in glass substrates is investigated over the wavelength range 500-900 nm. ITO overlayers are formed by reactive thermal evaporation in oxygen, followed by annealing in air to a maximum temperature of 320 degrees C. With air as the superstrate, losses in the waveguides were found to increase dramatically above 30-nm ITO thickness for TE polarization and above 50-nm thickness for TM. Losses were increased over the whole wavelength range for a superstrate index close to that of water. A one-dimensional, multilayer waveguide model is used in the interpretation of the experimental results.

[1]  I. Montrosset,et al.  Alternative expression of the dispersion equation in multilayered structures , 1990 .

[2]  Rene Heideman,et al.  Performance of a highly sensitive optical waveguide Mach-Zehnder interferometer immunosensor , 1993 .

[3]  J. Wilkinson,et al.  Indium tin oxide films by sequential evaporation , 1990 .

[4]  Kunihiro Fukui,et al.  Indium tin oxide thin films prepared by chemical vapour deposition , 1991 .

[5]  M. Brust,et al.  Electrochemically-controlled waveguide-coupled surface plasmon sensing , 1995 .

[6]  J. Albert,et al.  Characterization of planar optical waveguides by K(+)-ion exchange in glass. , 1985, Optics letters.

[7]  Yasuyuki Okamura,et al.  Low-voltage driving in nematic liquid crystal overlayered waveguide , 1986 .

[8]  Akira Fujishima,et al.  An application of optical waveguides to electrochemistry: construction of optical waveguide electrodes , 1988 .

[9]  Toh-Ming Lu,et al.  Deposition of amorphous fluoropolymer thin films by thermolysis of Teflon amorphous fluoropolymer , 1992 .

[10]  L. Ross,et al.  Integrated optical components in substrate glasses , 1989 .

[11]  M N Weiss,et al.  Determination of ion-exchanged channel waveguide profile parameters by mode-index measurements. , 1995, Applied optics.

[12]  Robert Wilson,et al.  Use of fluorescamine for the spectrofluorimetric investigation of primary amines on silanized glass and indium tin oxide-coated glass , 1995 .

[13]  H. Gnewuch,et al.  Mode-independent attenuation in evanescent-field sensors. , 1995, Applied optics.

[14]  R. M. De La Rue,et al.  Evanescent fluorescnece immunoassays performed with a disposable ion-exchanged patterned waveguide , 1993 .

[15]  J. Woollam,et al.  Spectroscopic ellipsometry studies of indium tin oxide and other flat panel display multilayer materials , 1994 .

[16]  M. T. Flanagan,et al.  A planar indium phosphate monomode waveguide evanescent field immunosensor , 1990 .

[17]  Jan Ingenhoff,et al.  Biosensors using integrated optical devices , 1993 .

[18]  O. S. Heavens,et al.  Optical Properties of Thin Solid Films , 2011 .

[19]  R. Latz,et al.  High Conducting Large Area Indium Tin Oxide Electrodes for Displays Prepared by DC Magnetron Sputtering , 1991 .

[20]  N. Balasubramanian,et al.  Electrical and optical properties of reactively evaporated indium tin oxide (ITO) films-dependence on substrate temperature and tin concentration , 1989 .

[21]  D. Schiffrin,et al.  Optoelectrochemical transduction on planar optical waveguides , 1992 .

[22]  J. E. Meerakker,et al.  On the Mechanism of ITO Etching: The Specificity of Halogen Acids , 1993 .

[23]  Rajinder S. Sethi,et al.  Transducer aspects of biosensors , 1991 .

[24]  J. Dobrowolski,et al.  Transparent, conducting indium tin oxide films formed on low or medium temperature substrates by ion-assisted deposition. , 1987, Applied optics.

[25]  M. Buchanan,et al.  Preparation of conducting and transparent thin films of tin‐doped indium oxide by magnetron sputtering , 1980 .

[26]  Ramu V. Ramaswamy,et al.  Fiber-compatible K/sup +/-Na/sup +/ ion-exchanged channel waveguides: fabrication and characterization , 1989 .

[27]  W. Lukosz,et al.  Direct optical immunosensing (sensitivity and selectivity) , 1992 .

[28]  W. Kern,et al.  Chemical vapor deposition of transparent electrically conducting layers of indium oxide doped with tin , 1975 .

[29]  J. Herrero,et al.  Electrochemical stability of indium tin oxide thin films , 1992 .

[30]  B. Luff,et al.  Detection of glucose via electrochemiluminescence in a thin-layer cell with a planar optical waveguide , 1995 .

[31]  Paul Lambeck,et al.  Integrated opto-chemical sensors , 1992 .