An Electrostatic Lower, Stator Axial Gap Wobble Motor: Design And Fabrication

The fabrication, initial modelling and first results of an electrostatic lower stator axial gap wobble motor are presented. The four mask fabrication process is based on polysilicon surface micromachining techniques. Three to twelve stator pole wobble motor designs have been realized with rotor radii of 50 and 100 micrometer. A theoretical model predicts torque generations in the nNm range at high electrostatic fields. Motors have typically been operated between 10 and 20 Volts. Initial experimental results are presented.

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