论文信息 - Investigation on the formation technique of SiGe Fin for the high mobility channel FinFET device - 字舞流文

Investigation on the formation technique of SiGe Fin for the high mobility channel FinFET device

A. Du | Guilei Wang | Jun Luo | Junfeng Li | H. Yin | Wenwu Wang | Qingzhu Zhang | Gaobo Xu | Xiaolei Wang | Hong Yang | Yongliang Li | Zhiqian Zhao | Xueli Ma | Haoyan Liu | Xiaohong Cheng | Ying Zan | Jing Xu | Junjie Li