论文信息 - Evaluation of magnetic field from varied permutation power transmission line at high technology nano-Fab

Evaluation of magnetic field from varied permutation power transmission line at high technology nano-Fab

We present optimal permutation of power transmission lines to reduce electro-magnetic influence at high technology nano-Fab. In this study, the magnetic field was lessened by mirror array power cable system, and simulation of results predicted the best permutations to decrease electromagnetic influence (EMI) value below 0.4 mG at working space without any shielding. Furthermore, this innovative method will cost down at high technology nano-Fab especially for 28 nanometer process.

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