Modeling and prototype experiment of a six-DOF parallel micro-manipulator with nano-scale accuracy

This paper presents a high-accurate micro-manipulator featured with monolithic compliant structure, orthogonally arranged parallel mechanism and piezoelectric (PZT) actuation. 6-SPS mechanism is employed to provide six degrees of freedom (DOF), including three linear translations and three rotations. The kinematics and stiffness of the micro-manipulator is studied first in this paper. Then, the relationship between PZT nominal displacement and the end pose is derived. Aiming at achieving trajectories with nano-scale accuracy, a two-step strategy is proposed. Finite element analysis (FEA) is conducted to verify the kinematics and stiffness model. Finally, in order to demonstrate the performance of the micro-manipulator, experiments of typical trajectories are carried out. The experimental result shows that the proposed micro-manipulator is capable of achieving trajectories with nano-scale accuracy.

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