Fabrication of high-k dielectric Calcium Copper Titanate (CCTO) target by solid state route

CaCu3Ti4O12 (CCTO) ceramic pellet of 10mm diameter has been synthesized by adopting solid state route. The structural and morphological characterization of the ceramics sample was carried out by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. XRD pattern revealed the CCTO phase formation, where as SEM micrograph shows the sample consisting of well defined grain and grain boundaries. The room temperature dielectric constant of the sample was found to be ∼ 5000 at 1kHz. After successful preparation of CCTO pellet, a 2 inch diameter CCTO sputtering target is also fabricated in order to deposit CCTO thin films for microelectronic applications.

[1]  E. Longo,et al.  CaCu3Ti4O12 thin films with non-linear resistivity deposited by RF-sputtering , 2013 .

[2]  R. Smith,et al.  Synthesis of the Giant Dielectric Constant Material CaCu3Ti4O12 by Wet-Chemistry Methods† , 2007 .

[3]  Jia-liang Zhang,et al.  Effect of Cu-stoichiometry on the dielectric and electric properties in CaCu3Ti4O12 ceramics , 2007 .

[4]  K. Varma,et al.  Influence of sintering conditions and doping on the dielectric relaxation originating from the surface layer effects in CaCu3Ti4O12 ceramics , 2007 .

[5]  M. Pan,et al.  A Bimodal Grain Size Model for Predicting the Dielectric Constant of Calcium Copper Titanate Ceramics , 2005 .

[6]  A. Sleight,et al.  Evidence for internal resistive barriers in a crystal of the giant dielectric constant material: CaCu3Ti4O12 , 2005 .

[7]  M. Shen,et al.  Microstructure and dielectric properties of pulsed-laser-deposited CaCu3Ti4O12 thin films on LaNiO3 buffered Pt/Ti/SiO2/Si substrates , 2005 .

[8]  Li Wei,et al.  Investigation of the Size Effect on the Giant Dielectric Constant of CaCu 3 Ti 4 O 12 Ceramic , 2004 .

[9]  G. Cao,et al.  Preparation of CaCu3Ti4O12 thin films by chemical solution deposition , 2004 .

[10]  W. Cao,et al.  Effects of postanneal conditions on the dielectric properties of CaCu3Ti4O12 thin films prepared on Pt/Ti/SiO2/Si substrates , 2003, cond-mat/0308159.

[11]  F. Morrison,et al.  CaCu3Ti4O12: One-step internal barrier layer capacitor , 2002 .

[12]  Margaret L. Gardel,et al.  Giant dielectric constant response in a copper-titanate , 2000 .

[13]  Arthur W. Sleight,et al.  High Dielectric Constant in ACu3Ti4O12 and ACu3Ti3FeO12 Phases , 2000 .