Atomic-Layer-Deposited Dielectric Thin Films on a Cu Clad Laminate Substrate for Embedded Metal–Insulator–Metal Capacitor Applications in Printed Circuit Boards
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Jeong Hwan Kim | Jae Hyuck Jang | C. Hwang | Jeong hwan Kim | T. Park | Yongsoo Oh | Hyung-Dong Kang | Y. Chung