Failure physics of integrated circuits — A review

Abstract This paper is a review of the most important results on failure physics of integrated circuits, as a synthesis of what has been recently encountered in the literature concerned with these problems. In the first part of the paper systematization of failure modes in integrated circuits is accomplished so that all failure modes are divided into four groups according to their origin: (i) failure modes associated with chip; (ii) failure modes resulting from leads and bonds; (iii) failure modes associated with encapsulation; and (iv) failure modes due to external effects and overstress. Also, some typical failure mode distributions of different types of integrated circuits are given and the effects of the changeover from LSI to VLSI on failure mode distributions are discussed. In the second part of the paper the most important tests for enhancing of the failure modes are enumerated and relationship between the failure modes and the tests for their detection is given. Also, the role of electrical testing by the curve tracer and the accompanying analytical techniques (scanning electron microscopy, transmission electron microscopy, electron beam microprobe, Auger electron spectroscopy and X-ray radiograph) are discussed. Finally, the diagnostic technique is described which, using simple electrical testing by the curve tracer and some tests for enhancing of the failure modes (high temperature bake and high temperature burn-in), enables simple detection of integrated circuit failure modes. In the third part of the paper a survey of test structures for failure analysis of integrated circuits is made. Test structures are divided into three groups according to the kind of the failure mode tested by them. First, the test structures for the analysis of the failures due to the process induced defects are described. Then, the test structures for the analysis of the failures due to traps at the interface silicon-oxide and mobile alcali ions in oxide are discussed. Finally, the test structures for the analysis of the metallization failures are considered.

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